NIROMATAutomation EngineeringAventinstr. 280469 Munich, GermanyPhone: +49 (0)89 - 21 02 58 89Fax: +49 (0)89 - 21 02 58 90E-Mail: info@niromat.com
Project micro-chuck Surface accuracy requirement:< +/- 1 micron all over the surface
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